HASTELLOY® Pressure Sensor for Corrosive Special Gas PC-601 Series
In semiconductor production processes, various halogen series reactive and corrosive special gases are used such as HBr and HCI. These gases generate corrosive product by reacting with small amount of water attached to inner surface of stainless steel of pressure sensor or gas filter used in gas supply piping system. This corrosive product generates particle and causes process contamination of semiconductor process. Pureron has developed PC-601 series pressure sensor for corrosive special gas application using HASTELLOY® which has far superior corrosion resistance than stainless steel SUS316L.
High Corrosion Resistance
HASTELLOY® having far superior corrosion resistance than stainless steel SUS316L against the halogen series reactive, corrosive special gases such as HBr and HCI used for gas contacting area. Electrochemical polishing also applied effective against corrosive special gas.
High Accuracy / High Reliability
High accuracy and high reliability with 0.25% maximum deviation from best fit line affected by linearity, hysteresis repeatability.
Wide Measurement Range
Wide pressure range available; gauge pressure 0 to 172.4KPa (1.76kgf/cm2) to 20,684KPa (210kgf/cm2), absolute pressure from 0 to 2,586 torr.
Cycle duration test, 1,000,000 times or more, conducted in each range.