Innovative packaging enables Sensirion's highly sensitive thermal flow sensor microchips to measure non-invasively through the wall of a flow channel inside a microfluidic planar substrate. This design provides unique sensitivity for liquid flow measurement and bubble detection in the range of 0 to 1000 microliters per minute. The sensors are particularly suitable for monitoring flow rates and improving system performances in biomedical and life science applications.
Non-invasive flow sensing is possible thanks to the high sensitivity achieved with CMOSens® Technology. A small digital CMOSens® microchip (2.2 x 3.5 mm) is bonded to the microfluidic channel substrate. In addition to the sensor element, it houses the complete digital intelligence and the memory necessary for signal linearization, temperature compensation and self-test algorithms. The chip provides a fully digital I²C interface. Electrical contact is made via metallization above the microfluidic substrate. Fluidic ports below facilitate easy integration of discrete sensors into numerous designs. The sensor boasts a short flow sensing response time of 30 ms, and sensor resolutions down to 0.5 nl/min are feasible. A digital microsensor chip provides a fully calibrated digital output, eliminating the need for additional signal conditioning.
This significant simplification of liquid flow sensing technology enables extremely small and efficient sensor solutions. Customized solutions based on this technology can also be developed for various applications; standard versions are available immediately. For more information, please contact our sensor experts or visit www.sensirion.com/lpx.