Fraunhofer EMFT will present a powerful, extremely miniaturized micropump, which allows for low-cost disposable devices in the field of medical technology: Due to the miniaturization, production costs in large quantities are expected to fall below one Dollar. With a size of only 5x5x0,6 mm3 the silicon pump chip is the smallest micro pump worldwide. It has an elaborated design with an extremely small dead volume, which allows for flow rates with air of 300 µl/min as well as a remarkable backpressure with air of 30 kPa. This makes the chip self-priming and tolerant against bubbles. The chip could be used in disposable patch pumps, e.g. for therapy of Diabetes, pain management or hormone therapy where smallest quantities have to be dosed.