Versatile mass flow controller with ultra fast settling time -- COMPAMED Trade Fair


Sensirion AG

Versatile mass flow controller with ultra fast settling time

Sensirion's new SFC5000 series mass flow controller

The Swiss sensor manufacturer Sensirion launches its new digital mass flow controller, suitable for diverse applications in the industrial and medical technology sectors. The new SFC5000 Series leverages Sensirion's CMOSens® Technology to provide extremely high accuracy, repeatability and reliability at a very attractive price.

The SFC5000 Series with its excellent long-term stability enables precise control over a wide control range of 1000:1. Its ultra-fast settling time is 50 milliseconds. The excellent performance of the mass flow controller is based on Sensirion's innovative CMOSens® Technology, which combines the high-precision sensor element and the analog and digital signal processing circuitry on a single tiny CMOS silicon chip. The sensor signal is converted into a fully calibrated and temperature compensated digital signal directly on the chip. The new mass flow controller features both analog and digital interfaces, enabling new features such as optional multigas, gas recognition and self-test capability.

The SFC5000 Series mass flow controller operates from a standard supply voltage of 14-24 VDC. It can be used with input pressures up to 10 bar (145 psi), and it is resistant to electromagnetic interference (EMI). Due to exceptionally fast reaction time of the flow chip combined with fast control algorithm and valve, inlet pressure fluctuations can be regulated in real time providing stable output flow profile. The mass flow controller features a vacuum-tight stainless steel package of the flow chip which is mounted on a sturdy aluminum or stainless steel flow body. The new SFC5000 is available with various connection options (down-mount, C-/W-seal, Swagelok, VCR and VCO). All this makes the new mass flow controller ideal for controlling and monitoring mass flow in many different applications such as plasma etching and deposition, process automation, analytical instrumentation, medical anesthesia/ventilation equipment and other areas. Sensirion has a strong competence and experience in offering customized solutions.

Sensirion's new SFC5000 Series mass flow controller is available for large volume OEM projects. The new digital MFC platform facilitates fast prototyping of OEM samples and offers significant advantages in after sale support. Furthermore, a new evaluation kit is released to support developers in quick and economical evaluation and qualification of the new mass flow controllers.

Additional information is available on the Sensirion website at