In many cases the handling of tiny sample volumes in diagnostic devices or the sparingly use of drugs in mobile drug delivery systems require miniaturized components. For prototyping of these microstructures the excimerlaser, like the one offered by Bartels Mikrotechnik, is a smart manufacturing tool. Any structure, stored as lateral information on masks, can be transferred into the substrate with an excellent depth control. And in addition to prototyping all advantages of the laser can be used for small series as well. With a minimum structure resolution of 5 µm, the process is not only precise. It is flexible, too. Because all single structures are stored in masks and can be simply combined. This allows different versions of a product for a good price.