Laser-based silicon crystallization for monolithic integration -- COMPAMED Trade Fair

Laser-based silicon crystallization for monolithic integration in MEMS sensors

12.10.2022

Image: Laser-based crystallization process for the manufacture of MEMS sensor units; Copyright: Fraunhofer ILT, Aachen, Germany

Gentle high-temperature crystallization: Fraunhofer ILT, together with Fraunhofer ISIT and IST, has developed a selective, laser-based crystallization process for the manufacture of MEMS sensor units directly on active circuits.

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Image: Microfluidics; Copyright: Messe Düsseldorf