10.12.2025

Spatial light modulators are gaining growing relevance in Japan’s semiconductor, medical technology and optics sectors. At Photonix Japan in Tokyo, Fraunhofer IPMS will present evaluation kits designed to support companies testing advanced micromirror systems and light control solutions.

Image: The image shows a compact micromirror module connected to a circuit board; Copyright: Fraunhofer IPMS

Micromirror arrays from Fraunhofer IPMS enable precise light modulation for semiconductor, medical and optical applications.

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The Fraunhofer Institute for Photonic Microsystems (IPMS) in Germany will present its latest spatial light modulator (SLM) solutions in Tokyo. These systems provide flexible configurations for precise light modulation by integrating either tilting or piston micromirrors. SLMs are essential tools in several industries, particularly in semiconductor manufacturing, medical technology, precision optics, microscopy, adaptive optics, and quantum computing. The ability to adjust light intensity, direction and phase at high speed allows companies to refine production workflows, inspection processes and imaging tasks.

Evaluation kits for industrial testing

To support companies seeking to analyze SLM performance, Fraunhofer IPMS offers evaluation kits with micromirror arrays of 64,000 pixels. Depending on the actuator type, each mirror can either tilt or move vertically. This configuration allows developers to assess various mirror architectures using a single platform.

“Typically, different mirror technologies necessitate distinct control systems,“ explains Dr. Michael Wagner from Fraunhofer IPMS. “Our kits allow different types of micromirrors to be evaluated on a single system, which is a unique feature that we are also offering to the Japanese market.“
These kits operate across ultraviolet, visible and near-infrared wavelengths, supporting applications relevant to Japan’s semiconductor and medical technology sectors. Components can also be used in the deep UV range, which is important for lithography and optical inspection.

Technical features for high-speed light control

The SLM mirrors are driven by dedicated electronics that enable modulation frequencies in the kilohertz range, a crucial capability for applications requiring rapid pattern changes. Nanometer-scale calibration supports precise and nearly continuous tilting or piston movements, ensuring high accuracy in demanding optical systems.
Each kit includes:

control electronics
a micromirror chip
software tools
operational support

This ensures that companies can integrate the technology quickly into their testing environments.

COMPAMED-tradefair.com; Source: Fraunhofer Institute for Photonic Microsystems IPMS

More about the Fraunhofer Institute for Photonic Microsystems IPMS at: www.ipms.fraunhofer.de/en