Piezo Elements and Actuators for Pumping and Metering
Microdiaphragm pumps require compact drives which can provide a continuous flow and variable flow rates. Due to the small volumes per pumping cycle, high cycle rates of up to several 10 kHz are necessary to achieve high flow rates.
A microdiaphragm pump comprises a valve unit and the pump diaphragm which, together with the piezoelectric actuator, form the pump drive.
The metered amounts range from the milli-, micro- and nano- to the picoliter range.
The fields of application for piezoelectric micropumps are in laboratory technology, medical technology, biotechnology, chemical analytics and process engineering, which require reliable metering of minute amounts of liquids and gases.